Center for Electron Microscopy (ZELMI)

Electron microprobe JEOL JXA-8530F

The  JEOL JXA-8530F electron beam microprobe with Schottky field emission cathode is primarily used for quantitative elemental analyses of high accuracy and resolution.



Office KWT 2
Room KWT-A 01A



With the JEOL  JXA-8530F, both SE and BSE recordings are possible in COMPO and TOPO modes. It is equipped with 5 WDX spectrometers for wavelength dispersive elemental analyses and one EDX detector for energy dispersive elemental analyses. Both WDX and EDX linescans and element mappings can be created.

Furthermore, it is possible to determine the elemental composition as well as the density of thin films using the thin film software StrataGem.

Using an X-ray source (iMOXS), X-ray fluorescence (µRFA) studies can also be performed on the microprobe.Trace elements can be detected with both the µXRF  and WDX spectrometers.

Trace element analysis in glass using micro X-ray fluorescence


blue:  Electron excited EDX spectrum -> high sensitivity for light elements  such as oxygen, sodium and magnesium

red:  EDX spectrum excited with X-rays -> high sensitivity for heavy elements  such as rubidium, strontium and zircon



- Detectable element range (WDX and EDX):    5B bis 92U

- Resolving power at  imaging with SE electrons:   3 nm

- Qualitative analytical resolution:  some 10 nm

- Quantitative analytical resolution::   50 - 150 nm

- Detection limit:  some 10 ppm

- Energy resolution WDX spectrometer (LIF-crystal) :    15 eV

- Energy resolution EDX detector :    126 eV

- Max. scannable range for WDX mapping (Stage Scan):  90 x 90 mm


iMOXS Micro X-ray fluorescence spectrometer (µRFA):

- Detection limit:  some 10 ppm

- Spot diameter X-ray beam on the sample:

-  100 µm

- Depth of information:  some 10 µm