Center for Electron Microscopy (ZELMI)

Crystal structure analysis

EBSD - Electron Backscatter Diffraction

EBSD examinations are carried out on the SEM Zeiss Gemini 982 and the SEM Hitachi S-2700.

The EBSD investigations are suitable to study the crystal orientation in crystallized materials (e.g. metals). Thus grain orientations can be determined and various analyses of the microstructure can be performed. Furthermore, different metal phases can be distinguished, which do not differ chemically (see example with titanium alpha and titanium beta).

For EBSD examinations, advanced metallographic preparation (vibratory polishing) is often necessary to produce a clear pattern image.