Experimental Physics/Electron- and Ion-Nanooptics


This state-of-the-art S/TEM instrument offers exceptional performance in terms of spatial resolution and elemental analysis:

  • First GrandARM2 outside Japan
  • Cold field emission electron source
  • 60 kV, 80 kV, 200 kV and 300 kV accelerating voltages
  • JEOL ETA Probe Cs corrector
  • Objective pole pieces with wide spacing
  • 63 pm STEM DF resolution @ 300 kV, 110 pm STEM DF resolution @ 80 kV
  • EDS detector with 2 x 158 mm2 and a collection angle of 2.2 sr
  • SE/BSE detector
  • BF, ABF, DF and HAADF detectors
  • Quantum Merlin pixelated detector with 256 x 256 pixels and a max. frame rate of 2400 Hz @ 6 bit
  • TVIPS TemCam XF416 CMOS camera with 4096 x 4096 pixels
  • TVPIS Universal Scan Generator for arbitrary scan patterns
  • Specimen holder
    • Double tilt holder for EDX
    • Retainer holder for sample exchange with microprobe
    • Single-tilt holder with four slots for high sample throughput
    • Double-tilt biasing holder for MEMS chips (Protochips Fusion Select; DFG procurement through Dr. Laura Niermann's project)

The instrument is operated jointly by members of AG Lehmann and ZELMI.

The GrandARM2 S/TEM instrument has been funded within the framework of a large instrument application. We are very grateful to the Deutsche Forschungsgemeinschaft and the TU Berlin for the funding!


Organization name Institute of Optics and Atomic Physics
Building ER
Room ER 296
Organization name Center for Electron Microscopy (ZELMI)
Building KWT-A
Room KWT-A 06

FEI Titan 80-300 Berlin Holography Special TEM

This excellent high-performance transmission electron microscope (TEM) with atomic resolution has been optimized by its electron optics specifically for electron holography. It offers:

  • First Titan X lens worldwide specifically for electron holography
  • High-brightness Schottky electron source
  • 80, 200 and 300 kV accelerating voltage
  • Up to three Möllenstedt biprisms
  • Lorentz lens
  • Image Cs corrector
  • Gatan US1000 CCD camera
  • 75 pm information limit at 300 kV accelerating voltage

The Titan TEM has been a joint project with the company FEI and has been financially supported by the German Research Foundation and the TU Berlin within the framework of a large-scale equipment application.


Organization name Institute of Optics and Atomic Physics
Building ER
Room ER 296

TEM Specimen Preparation

Often, it is not the instrument but the quality of the TEM sample itself that limits the performance of electron microscopy experiments. Therefore, a dedicated sample preparation laboratory with ultimate preparation tools and methods is equally important. In addition to the ZELMI preparation laboratory in the KWT building, the Electron Microscopy Building houses a dedicated preparation laboratory predominantly for TEM specimens. Among others, the following instruments are used:

  • Gatan Dimpler
  • Gatan PIPS
  • Fishione Ion-Mill
  • Fishione Plasma-Cleaner

Laboratory Responsible/Contact

Organization name Institute of Optics and Atomic Physics
Building TEM
Room TEM 005

Instruments of ZELMI

The Center for Electron Microscopy (ZELMI) offers a very broad portfolio of modern electron microscopic examination methods on a wide variety of instruments. Consequently, there is a lively exchange here.